Silicon particle formation in pyrolysis of silane and disilane

Israel Journal of Chemistry

Volumn 36, Issue 3, 1996, Pages 293-303

  Frenklach, Michael ^a   Ting, Larry ^b   Wang, Hai ^c   Rabinowitz, Martin J ^d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b TEXAS INSTRUMENTS   (United States)

^c Princeton University   (United States)

^d NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030335501     PISSN: 00212148     EISSN: None     Source Type: Journal    
DOI: 10.1002/ijch.199600041     Document Type: Article

References (88)

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