Snap-through bilayer microbeam

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 230-233

  Cabal, A ^a   Ross, D S ^b  

^a EASTMAN KODAK COMPANY   (United States)

^b ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bilayer microbeam; Buckling; Snap through

Indexed keywords

ACTUATORS; BOUNDARY CONDITIONS; BUCKLING; MATHEMATICAL MODELS; OSCILLATIONS; POISSON DISTRIBUTION; TENSILE STRESS; THERMAL EXPANSION; THERMOSTATS;

BILAYER MICROBEAM; RESIDUAL-COMPRESSIVE; SNAP-THROUGH; THERMAL MOMENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 2442557743     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. S. Timoshenko, "Analysis of Bi-Metal Thermostats," J. Opt. Soc., 415-428, 1959.
2. D. Burgreen and D. Regal, "Higher Mode Buckling of a Bimetallic Beam," J. Eng. Mech. Div., 97 (EM4), 1045-1055, 1971.
3. th International Conference on Solid-State Sensors and Actuators, 834-837, 1987.
4. M. Parameswaran, L. J. Ristic, K. Chau, A. M. Robinson, and W. Allegretto, "CMOS Electrothermal Microactuators," reprinted in Micromechanics and MEMS, ed. W. S. Trimmer, IEEE, Piscataway, 1996.
5. rd ed. Oxford: Pergamon Press, 1986.
6. D. S. Ross, A. Cabal, D. P. Trauernicht, and J. A. Lebens, "Temperature-Dependent Vibrations of Bilayer Microbeams," submitted for publication to IEEE J. MEMS.
7. th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, January 21-25, 2001, 353-356.
8. The International Mathematical Subroutine Library (IMSL) is produced by Visual Numerics Incorporated, www.vni.com, and is part of the Microsoft Visual Fortran compiler.
9. A. Cabal, D. S. Ross, J. A. Lebens, and D. P. Trauernicht, "Snap-Through Microactuator and Method of Use," submitted US Patent Application.