SCOPUS 정보 검색 플랫폼

Volumn 107, Issue 11, 2010, Pages

Modeling of radiative properties of Sn plasmas for extreme-ultraviolet source

(9) Sasaki, Akira a Sunahara, Atsushi b Furukawa, Hiroyuki b Nishihara, Katsunobu c Fujioka, Shinsuke c Nishikawa, Takeshi d Koike, Fumihiro e Ohasni, Hayato f Tanuma, Hajime f

a JAPAN ATOMIC ENERGY AGENCY (Japan)

b INSTITUTE FOR LASER TECHNOLOGY (Japan)

c OSAKA UNIVERSITY (Japan)

d OKAYAMA UNIVERSITY (Japan)

e KITASATO UNIVERSITY SCHOOL OF MEDICINE (Japan)

f TOKYO METROPOLITAN UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC CODES; ATOMIC DATA; ATOMIC PROCESS; ATOMIC STRUCTURE; CHARGE EXCHANGE SPECTROSCOPY; COLLISIONAL RADIATIVE MODEL; CONFIGURATION INTERACTIONS; EMISSION SPECTRUMS; EUV EMISSIONS; EUV SOURCE; EXTREME ULTRAVIOLETS; ION DENSITY; IONIZATION TEMPERATURE; MICRO-LITHOGRAPHY; MULTIPLY EXCITED STATE; RADIATION HYDRODYNAMICS SIMULATION; RADIATIVE PROPERTIES; SATELLITE LINES; SPECTRAL EMISSIVITY; SYSTEMATIC INVESTIGATIONS;

ATOMS; CHARGE TRANSFER; COLLISIONAL PLASMAS; CONVERSION EFFICIENCY; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; EXTREME ULTRAVIOLET LITHOGRAPHY; IONS; LASER PRODUCED PLASMAS; LIGHT SOURCES; OPACITY; RESONANCE; ULTRAVIOLET DEVICES; ULTRAVIOLET SPECTROSCOPY;

TIN;

EID: 77953636157 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3373427 Document Type: Article

Times cited : (56)

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