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Volumn 5, Issue 3, 2009, Pages 147-151

Atomic modeling of the plasma EUV sources

Author keywords

Collisional radiative model; EUV lithography; Laser produced plasma; Opacity; Plasma spectroscopy

Indexed keywords

EID: 67650321544 PISSN: 15741818 EISSN: None Source Type: Journal
DOI: 10.1016/j.hedp.2009.04.002 Document Type: Article

Times cited : (12)

References (12)

1
- 70350630231
- Endo A., Hoshino H., Suganuma T., Nowak K., Yanagida T., Yabu T., Asayama T., Ueno Y., Moriya M., Nakano M., Someya H., Nishisaka T., Abe T., Soumagne G., Komori H., Mizoguchi H., Sumitani A., and Toyoda K. Proc. SPIE Int. Soc. Opt. Eng. 6921-6929 (2008)
- (2008) Proc. SPIE Int. Soc. Opt. Eng. , vol.6921-6929
- Endo, A.¹ Hoshino, H.² Suganuma, T.³ Nowak, K.⁴ Yanagida, T.⁵ Yabu, T.⁶ Asayama, T.⁷ Ueno, Y.⁸ Moriya, M.⁹ Nakano, M.¹⁰ Someya, H.¹¹ Nishisaka, T.¹² Abe, T.¹³ Soumagne, G.¹⁴ Komori, H.¹⁵ Mizoguchi, H.¹⁶ Sumitani, A.¹⁷ Toyoda, K.¹⁸

2
- 84960259042
- Bakshi V. (Ed), SPIE Press
- In: Bakshi V. (Ed). EUV Sources for Lithography (2005), SPIE Press
- (2005) EUV Sources for Lithography

3
- 34248524898
- Novikov V.G., Ivanov V.V., Koshelev K.N., Krivtsun V.M., and Solomyannaya A.D. High Energy Density Phys. 3 (2007) 198
- (2007) High Energy Density Phys. , vol.3 , pp. 198
- Novikov, V.G.¹ Ivanov, V.V.² Koshelev, K.N.³ Krivtsun, V.M.⁴ Solomyannaya, A.D.⁵

4
- 0035887551
- Bar-Shalom A., Klapisch M., and Oreg J. J. Quant. Spectrosc. Radiat. Transfer 71 (2001) 169
- (2001) J. Quant. Spectrosc. Radiat. Transfer , vol.71 , pp. 169
- Bar-Shalom, A.¹ Klapisch, M.² Oreg, J.³

5
- 34249000450
- Rubiano J.G., Florido R., Bowen C., Lee R.W., and Ralchenko Y. High Energy Density Phys. 3 (2007) 225
- (2007) High Energy Density Phys. , vol.3 , pp. 225
- Rubiano, J.G.¹ Florido, R.² Bowen, C.³ Lee, R.W.⁴ Ralchenko, Y.⁵

6
- 0012958350
- Svendsen W., and O'Sullivan G. Phys. Rev. A50 (1994) 3710
- (1994) Phys. Rev. , vol.A50 , pp. 3710
- Svendsen, W.¹ O'Sullivan, G.²

7
- 33947584269
- Dortan F.G. J. Phys. B40 (2007) 599
- (2007) J. Phys. , vol.B40 , pp. 599
- Dortan, F.G.¹

8
- 20444496525
- Sasaki A., Nishihara K., Murakami M., Koike F., Kagawa T., Nishikawa T., Fujima K., Kawamura T., and Furukawa H. Appl. Phys. Lett. 85 (2004) 5857
- (2004) Appl. Phys. Lett. , vol.85 , pp. 5857
- Sasaki, A.¹ Nishihara, K.² Murakami, M.³ Koike, F.⁴ Kagawa, T.⁵ Nishikawa, T.⁶ Fujima, K.⁷ Kawamura, T.⁸ Furukawa, H.⁹

9
- 67650286739
- (in Japanese)
- Sasaki A., Nishihara K., and Murata M. J. Plasma Fusion Res. 84 (2008) 546 (in Japanese)
- (2008) J. Plasma Fusion Res. , vol.84 , pp. 546
- Sasaki, A.¹ Nishihara, K.² Murata, M.³

10
- 33947384596
- Ohashi H., Tanuma H., Fujioka S., Nishimura H., Sasaki A., and Nishihara H. J. Phys.: Conf. Ser. 58 (2007) 235
- (2007) J. Phys.: Conf. Ser. , vol.58 , pp. 235
- Ohashi, H.¹ Tanuma, H.² Fujioka, S.³ Nishimura, H.⁴ Sasaki, A.⁵ Nishihara, H.⁶

11
- 34248570328
- Sasaki A., Sunahara A., Nishihara K., Nishikawa T., Fujima K., Koike F., Kagawa T., and Tanuma H. High Energy Density Phys. 3 (2007) 250-255
- (2007) High Energy Density Phys. , vol.3 , pp. 250-255
- Sasaki, A.¹ Sunahara, A.² Nishihara, K.³ Nishikawa, T.⁴ Fujima, K.⁵ Koike, F.⁶ Kagawa, T.⁷ Tanuma, H.⁸

12
- 85016096429
- Nishihara K., Sunahara A., Sasaki A., Nunami M., Tanuma H., Fujioka S., Shimada Y., Fujima K., Furukawa H., Kato T., Koike F., More R., Murakami M., Nishikawa T., Zhakhovskii V., Gamata K., Takata A., Ueda H., Nishimura H., Izawa Y., Miyanaga N., and Mima K. Phys. Plasmas 15 (2008) 045708
- (2008) Phys. Plasmas , vol.15 , pp. 045708
- Nishihara, K.¹ Sunahara, A.² Sasaki, A.³ Nunami, M.⁴ Tanuma, H.⁵ Fujioka, S.⁶ Shimada, Y.⁷ Fujima, K.⁸ Furukawa, H.⁹ Kato, T.¹⁰ Koike, F.¹¹ More, R.¹² Murakami, M.¹³ Nishikawa, T.¹⁴ Zhakhovskii, V.¹⁵ Gamata, K.¹⁶ Takata, A.¹⁷ Ueda, H.¹⁸ Nishimura, H.¹⁹ Izawa, Y.²⁰ Miyanaga, N.²¹ Mima, K.²² more..

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