Estimation of emission efficiency for laser-produced EUV-plasmas

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 2, 2004, Pages 918-925

  Kawamura, Tohru ^a   Sunahara, Atsushi ^a   Gamada, Kouhei ^b   Fujima, Kazumi ^c   Koike, Fumihiro ^d   Furukawa, Hiroyuki ^a   Nishikawa, Takeshi ^e   Sasaki, Akira ^f   Kagawa, Takashi ^g   More, Richard ^h   Kato, Takako ^h   Murakami, Masakatsu ^b   Zhakhovskii, Vasilli ^b   Tanuma, Hajime ⁱ   Fujimoto, Takashi ^j   Shimada, Yoshinori ^a   Yamaura, Michiteru ^a   Hashimoto, Kazuhisa ^a   Uchida, Shigeaki ^a   Yamanaka, Chiyoe ^a   Okuno, Tomoharu ^b   Hibino, Takahiro ^b   Ueda, Nobuyoshi ^b   Matsui, Ryoji ^b   Tao, Yezheng ^b   Nakai, Mitsuo ^b   Shigemori, Keisuke ^b   Fujioka, Shinsuke ^b   Nagai, Keiji ^b   Norimatsu, Takayoshi ^b   Nishimura, Hiroaki ^b   Nishihara, Katsunobu ^b   Miyanaga, Noriaki ^b   Izawa, Yasukazu ^b   more..

^a INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c UNIVERSITY OF YAMANASHI   (Japan)

^d KITASATO UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^e OKAYAMA UNIVERSITY   (Japan)

^f JAPAN ATOMIC ENERGY AGENCY   (Japan)

^g NARA WOMEN'S UNIVERSITY   (Japan)

^h NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

ⁱ TOKYO METROPOLITAN UNIVERSITY   (Japan)

^j KYOTO UNIVERSITY   (Japan)

more..

Author keywords

Code development; Conversion efficiency; EUV; Laser produced tin plasmas

Indexed keywords

COMPUTER SIMULATION; HYDRODYNAMICS; KINEMATICS; LASER BEAM EFFECTS; LASER PRODUCED PLASMAS; TIN; ULTRAVIOLET RADIATION; X RAYS;

CODE DEVELOPMENT; CONVERSION EFFICIENCY (CE); EUV; LASER-PRODUCED TIN-PLASMAS;

LITHOGRAPHY;

EID: 3843121963     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535031     Document Type: Conference Paper

References (10)

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