Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength

Applied Physics Letters

Volumn 90, Issue 18, 2007, Pages

  White, J ^a   Dunne, P ^a   Hayden, P ^a   O'Reilly, F ^a   O'Sullivan, G ^a  

^a UNIVERSITY COLLEGE DUBLIN   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; GAS LASERS; LIGHT SOURCES; LITHOGRAPHY; NEODYMIUM LASERS; REFLECTION;

LASER WAVELENGTH; MULTILAYER OPTICS REFLECTIVITY; POWER DENSITY; RADIATION TRANSPORT MODEL;

LASER PRODUCED PLASMAS;

EID: 34247874741     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2735944     Document Type: Article

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