Effect of the satellite lines and opacity on the extreme ultraviolet emission from high-density Xe plasmas

Applied Physics Letters

Volumn 85, Issue 24, 2004, Pages 5857-5859

  Sasaki, Akira ^a   Nishihara, Katsunobu ^b   Murakami, Masakatsu ^b   Koike, Fumihiro ^c   Kagawa, Takashi ^d   Nishikawa, Takashi ^e   Fujima, Kazumi ^f   Kawamura, Tohru ^g   Furukawa, Hiroyuki ^g  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c KITASATO UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^d NARA WOMEN'S UNIVERSITY   (Japan)

^e OKAYAMA UNIVERSITY   (Japan)

^f UNIVERSITY OF YAMANASHI   (Japan)

^g INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; POSITIVE IONS; RESONANCE; SATELLITES; SPECTRUM ANALYSIS; THERMODYNAMICS; ULTRAVIOLET RADIATION; XENON;

DISCHARGE-PUMPED PLASMAS; EXTREME ULTRAVIOLET (EUV) EMISSION; SATELLITE LINES; SPECTRAL STRUCTURE;

PLASMAS;

EID: 20444496525     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1834994     Document Type: Article

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