Plasma physics and radiation hydrodynamics in developing

Physics of Plasmas

Volumn 15, Issue 5, 2008, Pages

  Nishihara, Katsunobu ^a   Sunahara, Atsushi ^b   Sasaki, Akira ^c   Nunami, Masanori ^a   Tanuma, Hajime ^d   Fujioka, Shinsuke ^a   Shimada, Yoshinori ^b   Fujima, Kazumi ^e   Furukawa, Hiroyuki ^a   Kato, Takako ^f   Koike, Fumihiro ^g   More, Richard ^f   Murakami, Masakatsu ^a   Nishikawa, Takeshi ^h   Zhakhovskii, Vasilii ^a   Gamata, Kouhei ^a   Takata, Akira ^a   Ueda, Hirofumi ^a   Nishimura, Hiroaki ^a   Izawa, Yasukazu ^a   Miyanaga, Noriaki ^a   Mima, Kunoki ^a   more..

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

^d TOKYO METROPOLITAN UNIVERSITY   (Japan)

^e UNIVERSITY OF YAMANASHI   (Japan)

^f NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^g KITASATO UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^h OKAYAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDRODYNAMICS; LASER PRODUCED PLASMAS; LITHOGRAPHY; OPTIMIZATION; ULTRAVIOLET RADIATION; WAVELENGTH;

EXTREME ULTRAVIOLET (EUV) RADIATION; NEXT-GENERATION SEMICONDUCTOR DEVICES; PLASMA PHYSICS; RADIATION HYDRODYNAMICS;

PLASMA TURBULENCE;

EID: 44649180382     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2907154     Document Type: Article

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