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Volumn 40, Issue 3, 2007, Pages 599-615

Influence of configuration interaction on satellite lines of xenon and tin in the EUV region

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; CARRIER CONCENTRATION; EXTREME ULTRAVIOLET LITHOGRAPHY; IONS; PHASE TRANSITIONS;

EID: 33947584269     PISSN: 09534075     EISSN: 13616455     Source Type: Journal    
DOI: 10.1088/0953-4075/40/3/015     Document Type: Article
Times cited : (13)

References (36)
  • 16
    • 33947598475 scopus 로고    scopus 로고
    • de Gaufridy de Dortan F 2007 Plasma Phys. at press; also on theses online of CNRS (http://tel.ccsd.cnrs.fr/documents/archives0/00/00/85/08/index_fr.html)
    • (2007) Plasma Phys.
    • De Gaufridy De Dortan, F.1
  • 24
    • 33947580623 scopus 로고    scopus 로고
    • Conversion efficiency of LPP sources
    • Nishihara K, Sasaki A, Sunahara A and Nishikawa T 2006 Conversion efficiency of LPP sources Proc. SPIE (EUV Sources for Lithography vol PM149) (Bellingham, WA: SPIE Optical Engineering Press) chapter 11
    • (2006) Proc. SPIE
    • Nishihara, K.1    Sasaki, A.2    Sunahara, A.3    Nishikawa, T.4
  • 25
    • 33947577866 scopus 로고    scopus 로고
    • Novikov V 2006 private communication
    • (2006)
    • Novikov, V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.