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Volumn 87, Issue 4, 2005, Pages

Comparative study on emission characteristics of extreme ultraviolet radiation from CO 2 and Nd:YAG laser-produced tin plasmas

Author keywords

[No Author keywords available]

Indexed keywords

CONVERSION EFFICIENCY (CE); EXTREME ULTRAVIOLET (EUV); LASER-PRODUCED PLASMA (LPP); PLASMA PRODUCTION;

CARBON DIOXIDE; LANGMUIR BLODGETT FILMS; LITHOGRAPHY; NEODYMIUM; NICKEL; PLASMAS; SPECTRUM ANALYSIS;

ULTRAVIOLET RADIATION;

EID: 23744482333 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1989441 Document Type: Article

Times cited : (165)

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