The static and dynamic behavior of mems arches under electrostatic actuation

2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009

Volumn , Issue , 2009, Pages

  Younis, Mohammad I ^a   Ouakad, Hassen M ^a  

^a State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AC HARMONICS; DC VOLTAGE; DISTRIBUTED-PARAMETER MODEL; ELECTROSTATIC ACTUATION; FORCED VIBRATION RESPONSE; MICROMACHINED; MODE SHAPES; NONLINEAR ALGEBRAIC EQUATIONS; NONLINEAR BEHAVIOR; PULL-IN; SHALLOW ARCH; SNAP-THROUGH; SOFTENING BEHAVIOR; STATIC AND DYNAMIC BEHAVIORS; SYMMETRIC MODE;

ELECTRIC LOAD SHEDDING; ELECTROSTATIC ACTUATORS; GALERKIN METHODS; MECHATRONICS; NATURAL FREQUENCIES; NONLINEAR EQUATIONS; ORDINARY DIFFERENTIAL EQUATIONS; STRUCTURAL PANELS;

ARCHES;

EID: 70449646696     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISMA.2009.5164821     Document Type: Conference Paper

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