The static and dynamic behavior of MEMS arches under electrostatic actuation

Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009

Volumn 6, Issue , 2010, Pages 607-616

  Ouakad, Hassen M ^a   Younis, Mohammad I ^a   Alsaleem, Fadi M ^a   Miles, Ronald ^a   Cui, Weili ^a  

^a State University of New York   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AC HARMONICS; AC LOAD; DC LOAD; DC VOLTAGE; DISTRIBUTED-PARAMETER MODEL; DYNAMICAL BEHAVIORS; ELECTROSTATIC ACTUATION; FORCED VIBRATION RESPONSE; GALERKIN; METHOD OF MULTIPLE SCALE; MICRO BEAMS; MICROMACHINED; PRIMARY RESONANCE; PULL-IN; REDUCED ORDER MODELS; SHALLOW ARCH; SNAP-THROUGH; STATIC AND DYNAMIC BEHAVIORS; THEORETICAL RESULT;

ARCHES; ELECTRIC LOAD SHEDDING; ELECTROSTATIC ACTUATORS; NATURAL FREQUENCIES; PERTURBATION TECHNIQUES; POLYSILICON;

DYNAMIC RESPONSE;

EID: 77953740860     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/DETC2009-87024     Document Type: Conference Paper

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