Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers

Surface Science

Volumn 604, Issue 11-12, 2010, Pages 1015-1021

  Jonnard, Philippe ^a,b   Maury, Hélène ^a,b   Le Guen, Karine ^a,b   André, Jean Michel ^a,b   Mahne, Nicola ^c   Giglia, Angelo ^c   Nannarone, Stefano ^c,d   Bridou, Françoise ^e  

^a SORBONNE UNIVERSITÉ   (France)

^b Universit Pierre et Marie Curie Paris 6   (France)

^c LABORATORIO TASC   (Italy)

^d UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

^e CNRS   (France)

Author keywords

Annealing; B4C; Diffusion barrier; Multilayer; Sc; Si; X ray reflectivity; X ray scattering

Indexed keywords

B4C; CORRELATION LENGTHS; PERIODIC MULTILAYERS; REFLECTIVITY CURVE; SC; SCATTERING CURVE; THERMAL STABILITY; THREE-WAVELENGTHS; X RAY REFLECTIVITY;

ANNEALING; CURVE FITTING; DIFFUSION BARRIERS; FILM GROWTH; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; REFLECTION; SCANDIUM; SCATTERING; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION; X RAY SCATTERING;

MULTILAYERS;

EID: 77951254107     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2010.03.012     Document Type: Article

References (35)

1. Macchietto C.D., Benware B.R., and Rocca J.J. Optics Letters 24 (1999) 1115
2. Constant E., Garzella D., Breger P., Mevel E., Dorrer C., Le Blanc C., Salin F., and Agostini P. Physical Review Letters 82 (1999) 1668
3. Windt D.L., Donguy S., Seely J., Kjornrattanawanich B., Gullikson E.M., Walton C.C., Golub L., and DeLuca E. Optics for EUV, X-Ray and Gamma-Ray Astronomy 5168 (2004) 1
4. Berreman D.W., Bjorkholm J.E., Becker M., Eichner L., Freeman R.R., Jewell T.E., Mansfield W.M., Macdowell A.A., Omalley M.L., Raab E.L., Silfvas W.T., Szeto L.H., Tennant D.M., Waskiewicz W.K., White D.L., Windt D.L., and Wood O.R. Applied Physics Letters 56 (1990) 2180
5. Kozhevnikov I.V., Balakireva L.L., Fedorenko A.I., Kopealets I.A., Levashov V.E., Stetsenko A.N., Struk I.I., and Vinogradov A.V. Optics Communications 125 (1996) 13
6. Uspenskii Y.A., Levashov V.E., Vinogradov A.V., Fedorenko A.I., Kondratenko V.V., Pershin Y.P., Zubarev E.N., Mrowka S., and Schafers F. Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment 448 (2000) 147
7. Kaiser N., Yulin S., Feigl T., Bernitzki H., and Lauth H. Proceedings of the SPIE - The International Society for Optical Engineering 5250 (2004) 109
8. Gautier J., Delmotte F., Bridou F., Ravet M.F., Varnière F., Roulliay M., Jérôme A., and Vickridge I. Applied Physics A-Materials Science & Processing 88 (2007) 719
9. Fedorenko A.I., Pershin Y.P., Poltseva O.V., Ponomarenko A.G., Sevryukova V.S., Voronov D.L., and Zubarev E.N. Journal of X-Ray Science and Technology|Journal of X-Ray Science and Technology 9 (2001) 35
10. Voronov D.L., Zubarev E.N., Kondratenko V.V., Penkov A.V., and Pershin Y.P. Functional Materials 9 (2002) 534-539
11. Shendruk T.N., Moeves A., Kurmaev E.Z., Ochin P., Maury H., André J.-M., Le Guen K., and Jonnard P. Thin Solid Films 518 (2010) 3808
12. Voronov D.L., Zubarev E.N., Kondratenko V.V., Penkov A.V., Pershin Y.P., and Fedorenko A.I. Functional Materials 6 (1999) 856-859
13. Vinogradov A.V., Pershin Y.P., Zubarev E.N., Voronov D.L., Pen'kov A.V., Kondratenko V.V., Uspenskii Y.A., Artioukov I.A., and Seely J.F. Proceedings of SPIE 4505 (2001) 230
14. Voronov D.L., Zubarev E.N., Kondratenko V.V., Pershin Y.P., Sevryukova V.A., and Bugayev Y.A. Thin Solid Films 513 (2006) 152
15. Yulin S.A., Schaefers F., Feigl T., and Kaiser N. Proceedings of the SPIE - The International Society for Optical Engineering 5193 (2004) 155
16. Bottger T., Meyer D.C., Paufler P., Braun S., Moss M., Mai H., and Beyer E. Thin Solid Films 444 (2003) 165
17. Patelli A., Ravagnan J., Rigato V., Salmaso G., Silvestrini D., Bontempi E., and Depero L.E. Applied Surface Science 238 (2004) 262
18. Maury H., Jonnard P., André J.M., Gautier J., Roulliay M., Bridou F., Delmotte F., Ravet M.F., Jérome A., and Holliger P. Thin Solid Films 514 (2006) 278
19. Maury H., Jonnard P., André J.M., Gautier J., Bridou F., Delmotte F., and Ravet M.F. Surface Science 601 (2007) 2315
20. Jankowski A.F., Saw C.K., Walton C.C., Hayes J.P., and Nilsen J. Thin Solid Films 469 (2004) 372
21. Yulin S.A., Kuhlmann T., Feigl T., and Kaiser N. Proceedings of the SPIE - The International Society for Optical Engineering 4782 (2002) 285
22. Nevot L., Pardo B., and Corno J. Revue De Physique Appliquee 23 (1988) 1675
23. André J.M., Avila A., Barchewitz R., Benbalagh R., Delaunay R., Druart D., Jonnard P., and Ringuenet H. European Physical Journal, Applied Physics 31 (2005) 147
24. Nannarone S., Borgatti F., DeLuisa A., Doyle B.P., Gazzadi G.C., Giglia A., Finetti P., Mahne N., Pasquali L., Pedio M., Selvaggi G., Naletto G., Pelizzo M.G., and Tondello G. AIP Conference Proceedings 708 (2004) 450
25. Grisham M., Vaschenko G., Menoni C.S., Rocca J.J., Pershyn Y.P., Zubarev E.N., Voronov D.L., Sevryukova V.A., Kondratenko V.V., Vinogradov A.V., and Artioukov I.A. Optics Letters 29 (2004) 620
26. Gokhale A.B., and Abbaschian G.J. Bulletin of Alloy Phase Diagrams 7 (1986) 333-336
27. Eremenko V.N., Meleshevich K.A., Buyanov Y.I., and Martsenyuk P.S. Powder Metallurgy and Metal Ceramics 967 (1988) 967-972
28. Kotroczo V., and McColm I.J. Journal of Alloys and Compounds 203 (1994) 259
29. Lukashenko G.M., Polotskaya R.I., and Sidorko V.R. Journal of Alloys and Compounds 179 (1992) 299
30. Siffalovic P., Majkova E., Chitu L., Jergel M., Luby S., Keckes J., Maier G., Timmann A., Roth S.V., Tsuru T., Harada T., Yamamoto M., and Heunzmann U. Vacuum 84 (2010) 19
31. de Boer D.K.G. Physical Review B 51 (1995) 5297
32. Gösele U., and Tu K.N. Journal of Applied Physics 53 (1982) 3252
33. Yulin S., Feigl T., Kuhlmann T., Kaiser N., Fedorenko A.I., Kondratenko V.V., Poltseva O.V., Sevryukova V.A., Zolotaryov A.Y., and Zubarev E.N. Journal of Applied Physics 92 (2002) 1216
34. Pinegyn V., Zubarev E.N., Kondratenko V.V., Sevryukova V.A., Yulin S.A., Feigl T., and Kaiser N. Thin Solid Films 516 (2008) 2973
35. Savage D.E., Schimke N., Phang Y.-H., and Lagally M.G. Journal of Applied Physics 71 (1992) 3283