Structure and stressed state of molybdenum layers in Mo/Si multilayers

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 2973-2980

  Pinegyn, V I ^a   Zubarev, E N ^a   Kondratenko, V V ^a   Sevryukova, V A ^a   Yulin, S A ^b   Feigl, T ^b   Kaiser, N ^b  

^a NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Interfaces; Multilayer; Stress; Transmission electron microscopy (TEM); X ray diffraction

Indexed keywords

CRYSTAL LATTICES; INTERFACES (MATERIALS); ION BOMBARDMENT; MOLYBDENUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MOLYBDENUM LAYERS; SYMMETRICAL BIAXIAL STRESSES;

MULTILAYER FILMS;

EID: 39649104125     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.123     Document Type: Article

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