Study of fast diffusion species in Sc/Si multilayers by W-based marker analysis

Thin Solid Films

Volumn 513, Issue 1-2, 2006, Pages 152-158

  Voronov, D L ^a   Zubarev, E N ^a   Kondratenko, V V ^a   Pershin, Yu P ^a   Sevryukova, V A ^a   Bugayev, Ye A ^a  

^a NATIONAL TECHNICAL UNIVERSITY   (Ukraine)

Author keywords

Diffusion marker analysis; Multilayer X ray mirrors; Small angle X ray diffractometry; Solid state amorphization

Indexed keywords

AMORPHIZATION; DIFFUSION; SCANDIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

DIFFUSION MARKER ANALYSIS; MULTILAYER X-RAY MIRRORS; SMALL ANGLE X-RAY DIFFRACTOMETRY; SOLID STATE AMORPHIZATION;

MULTILAYERS;

EID: 33745258639     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.070     Document Type: Article

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