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Volumn 9, Issue 1, 2001, Pages 35-42
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Structure of Sc/Si multilayer mirrors in as-deposited state and after annealing
a a a a a a a
a
NONE
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COMPUTER SIMULATION;
DEPOSITION;
ELECTRON MICROSCOPY;
INTERFACES (MATERIALS);
PHASE COMPOSITION;
SCANDIUM;
SILICON;
STRUCTURE (COMPOSITION);
SURFACE ROUGHNESS;
X RAY ANALYSIS;
CROSS SECTIONAL ELECTRON MICROSCOPY;
MAGNETRON TECHNOLOGY;
X RAY MICROANALYSIS;
MIRRORS;
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EID: 0034917431
PISSN: 08953996
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (12)
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References (12)
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