메뉴 건너뛰기




Volumn 99, Issue 26, 2007, Pages

Zone-doubling technique to produce ultrahigh-resolution X-ray optics

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; FABRICATION; PHOTONS; X RAY MICROSCOPES;

EID: 37749000911     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.99.264801     Document Type: Article
Times cited : (152)

References (16)
  • 1
    • 33751571479 scopus 로고    scopus 로고
    • APPLAB 0003-6951 10.1063/1.2397483
    • G.C. Yin, Appl. Phys. Lett. 89, 221122 (2006). APPLAB 0003-6951 10.1063/1.2397483
    • (2006) Appl. Phys. Lett. , vol.89 , pp. 221122
    • Yin, G.C.1
  • 2
    • 33645279539 scopus 로고    scopus 로고
    • PRLTAO 0031-9007 10.1103/PhysRevLett.96.127401
    • H.C. Kang, Phys. Rev. Lett. 96, 127401 (2006). PRLTAO 0031-9007 10.1103/PhysRevLett.96.127401
    • (2006) Phys. Rev. Lett. , vol.96 , pp. 127401
    • Kang, H.C.1
  • 3
    • 21744452342 scopus 로고    scopus 로고
    • NATUAS 0028-0836 10.1038/nature03719
    • W.L. Chao, Nature (London) NATUAS 0028-0836 435, 1210 (2005). 10.1038/nature03719
    • (2005) Nature (London) , vol.435 , pp. 1210
    • Chao, W.L.1
  • 5
    • 34247602602 scopus 로고    scopus 로고
    • MIENEF 0167-9317 10.1016/j.mee.2007.01.151
    • C. David, Microelectron. Eng. 84, 1172 (2007). MIENEF 0167-9317 10.1016/j.mee.2007.01.151
    • (2007) Microelectron. Eng. , vol.84 , pp. 1172
    • David, C.1
  • 6
    • 0344667722 scopus 로고    scopus 로고
    • ACIEF5 1433-7851 10.1002/anie.200301652
    • M. Leskelä and M. Ritala, Angew. Chem., Int. Ed. ACIEF5 1433-7851 42, 5548 (2003). 10.1002/anie.200301652
    • (2003) Angew. Chem., Int. Ed. , vol.42 , pp. 5548
    • Leskelä, M.1    Ritala, M.2
  • 7
    • 0015386691 scopus 로고
    • JOSAAH 0030-3941
    • M. Young, J. Opt. Soc. Am. 62, 972 (1972). JOSAAH 0030-3941
    • (1972) J. Opt. Soc. Am. , vol.62 , pp. 972
    • Young, M.1
  • 8
    • 37749012713 scopus 로고    scopus 로고
    • This kinematic approximation gives good results in the limit of large zone widths and short wavelengths.
    • This kinematic approximation gives good results in the limit of large zone widths and short wavelengths.
  • 9
    • 0031247583 scopus 로고    scopus 로고
    • For the structure dimensions demonstrated in this Letter, dynamical effects already begin to play a role, as described in APPLAB 0003-6951 10.1063/1.120069
    • For the structure dimensions demonstrated in this Letter, dynamical effects already begin to play a role, as described in G. Schneider, Appl. Phys. Lett. 71, 2242 (1997); APPLAB 0003-6951 10.1063/1.120069
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 2242
    • Schneider, G.1
  • 10
    • 0026866838 scopus 로고
    • OPCOB8 0030-4018 10.1016/0030-4018(92)90182-Q
    • J. Maser, and G. Schmahl, Opt. Commun. 89, 355 (1992). OPCOB8 0030-4018 10.1016/0030-4018(92)90182-Q
    • (1992) Opt. Commun. , vol.89 , pp. 355
    • Maser, J.1    Schmahl, G.2
  • 11
    • 37749035150 scopus 로고    scopus 로고
    • However, a full treatment of these effects is very complex and beyond the scope of this Letter.
    • However, a full treatment of these effects is very complex and beyond the scope of this Letter.
  • 12
    • 0016037493 scopus 로고
    • JOSAAH 0030-3941
    • J. Kirz, J. Opt. Soc. Am. 64, 301 (1974). JOSAAH 0030-3941
    • (1974) J. Opt. Soc. Am. , vol.64 , pp. 301
    • Kirz, J.1
  • 14
    • 4344694233 scopus 로고    scopus 로고
    • JESOAN 0013-4651 10.1149/1.1761011
    • T. Aaltonen, J. Electrochem. Soc. 151, G489 (2004). JESOAN 0013-4651 10.1149/1.1761011
    • (2004) J. Electrochem. Soc. , vol.151 , pp. 489
    • Aaltonen, T.1
  • 15
    • 33947428301 scopus 로고    scopus 로고
    • APCPCS 0094-243X 10.1063/1.2436109
    • U. Flechsig, AIP Conf. Proc. 879, 505 (2007). APCPCS 0094-243X 10.1063/1.2436109
    • (2007) AIP Conf. Proc. , vol.879 , pp. 505
    • Flechsig, U.1
  • 16
    • 0032170781 scopus 로고    scopus 로고
    • JSBIEM 1047-8477 10.1006/jsbi.1998.4017
    • D. Scherfeld, J. Struct. Biol. 123, 72 (1998). JSBIEM 1047-8477 10.1006/jsbi.1998.4017
    • (1998) J. Struct. Biol. , vol.123 , pp. 72
    • Scherfeld, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.