Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5379-5382

  Ma, Shengli ^a   Xu, Bin ^a   Wu, Guizhi ^a   Wang, Yanfeng ^a   Ma, Fei ^a   Ma, Dayan ^a   Xu, Kewei ^a   Bell, Tom ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

AEMS; Friction coefficient; Hardness; Nanocomposites; SiCN films

Indexed keywords

CARBON; CAVITY RESONATORS; ELECTRIC GROUNDING; GRAPHITE; HYBRID COMPUTERS; MECHANICAL PROPERTIES; NONMETALS; SILICON; TARGETS;

AEMS; FRICTION COEFFICIENT; GRAPHITE TARGETS; HARD FILMS; HARDNESS; HYBRID SYSTEMS; MAGNETIC SPUTTERING; MIXED GASES; NANOCOMPOSITES; SICN FILMS; STAINLESS STEEL SUBSTRATES;

STAINLESS STEEL;

EID: 50349093581     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.057     Document Type: Article

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