Deposition and optical studies of silicon carbide nitride thin films

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 151-154

  Sundaram, K B ^a   Alizadeh, J ^a  

^a University of Central Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CYANIDES; DEPOSITION; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICON CARBIDE; SILICON NITRIDE;

REACTIVE RADIOACTIVE FREQUENCY SPUTTERING; SILICON CARBIDE NITRIDE;

THIN FILMS;

EID: 0033690662     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00956-1     Document Type: Article

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