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Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 2187-2196

The effect of processing parameters on amorphous carbon nitride layer properties

(3) Rusop, M a Soga, T a Jimbo, T a

a NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

a CNx; Camphor; Laser fluence; PLD; Substrate temperature

Indexed keywords

ABSORPTION; APPROXIMATION THEORY; CARBON NITRIDE; CHEMICAL BONDS; DEPOSITION; DESORPTION; LASER ABLATION; LASER BEAM EFFECTS; PULSED LASER DEPOSITION; QUARTZ; SUBSTRATES;

CAMPHOR; LASER FLUENCES (LF); SUBSTRATE TEMPERATURES (ST); TARGET TO SUBSTRATE DISTANCES (TSD);

AMORPHOUS MATERIALS;

EID: 7544251433 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.06.024 Document Type: Conference Paper

Times cited : (11)

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