Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering

Wear

Volumn 265, Issue 1-2, 2008, Pages 261-265

  Zheng, X H ^a,b   Tu, J P ^a   Gu, B ^a   Hu, S B ^c  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY OF TECHNOLOGY   (China)

^c HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Amorphous carbon; Friction and wear; Magnetron sputtering; TiN

Indexed keywords

AMORPHOUS CARBON; FRICTION; MAGNETRON SPUTTERING; WEAR OF MATERIALS;

SUBSTRATE TEMPERATURE; TRIBOMETER;

COMPOSITE FILMS;

AMORPHOUS CARBON; COMPOSITE FILMS; FRICTION; MAGNETRON SPUTTERING; WEAR OF MATERIALS;

EID: 41149179165     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2007.10.007     Document Type: Article

References (23)

1. Su Y.L., and Kao W.H. Optimum multilayer TiN-TiCN coating for wear resistance and actual application. Wear 223 (1998) 119-130
2. Kim G.S., Lee S.Y., Hahn J.H., Lee B.Y., Han J.G., Lee J.H., and Lee S.Y. Effects of the thickness of Ti buffer layer on the mechanical properties of TiN coatings. Surf. Coat. Technol. 171 (2003) 83-90
3. Cselle T., and Barimani A. Today's applications and future developments of coatings for drills and rotating cutting tools. Surf. Coat. Technol. 76-77 (1995) 712-718
4. x multilayer coatings with an equiaxed microstructure. Surf. Coat. Technol. 146-147 (2001) 209-214
5. Barshilia H.C., and Rajam K.S. Structure and properties of reactive DC magnetron sputtered TiN/NbN hard superlattices. Surf. Coat. Technol. 183 (2004) 174-183
6. Yoon S.-Y., Kim J.-K., and Kim K.H. A comparative study on tribological behavior of TiN and TiAlN coatings prepared by arc ion plating technique. Surf. Coat. Technol. 161 (2002) 237-242
7. 2 and TiN/TiCN/a-C: H coatings. J. Mater. Process. Technol. 127 (2002) 182-186
8. Chu K., Shum P.W., and Shen Y.G. Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering. Mater. Sci. Eng. A 131 (2006) 62-71
9. Tamura M., and Kubo H. Deposition of and annealing effect on Ti(C, N) coatings. Surf. Coat. Technol. 49 (1991) 194-198
10. Zhong D., Sutter E., Moore J.J., Mustoe G.G.W., Levashov E.A., and Disam J. Mechanical properties of Ti-B-C-N coatings deposited by magnetron sputtering. Thin Solid Films 398/399 (2001) 320-325
11. Tamura M., and Tokunaga T. Deposition of Ti-C-N coatings onto large-diameter tip saws. Surf. Coat. Technol. 108-109 (1998) 551-557
12. Fujisawa N., McKenzie D.R., James N.L., Woodard J.C., and Swain M.V. Combined influences of mechanical properties and surface roughness on the tribological properties of amorphous carbon coatings. Wear 260 (2006) 62-74
13. Yang B., Huang Z.H., Liu C.S., Zeng Z.Y., Fan X.J., and Fu D.J. Characterization and properties of Ti-containing amorphous carbon nanocomposite coatings prepared by middle frequency magnetron sputtering. Surf. Coat. Technol. 200 (2006) 5812-5818
14. Yang W.J., Sekino T., Shim K.B., Niihara K., and Auh K.H. Deposition and microstructure of Ti-containing diamond-like carbon nanocomposite films. Thin Solid films 473 (2005) 252-258
15. Lemoine P., Quinn J.P., Maguire P., and McLaughlin J.A. Comparing hardness and wear data for tetrahedral amorphous carbon and hydrogenated amorphous carbon thin films. Wear 257 (2004) 509-522
16. Zou Y.S., Wang W., Song G.H., Du H., Gong J., Huang R.F., and Wen L.S. Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating. Mater. Lett. 58 (2004) 3271-3275
17. Shum P.W., Zhou Z.F., and Li K.Y. Tribological performance of amorphous carbon films prepared on steel substrates with carbon implantation pre-treatment. Wear 256 (2004) 362-373
18. Andersson J., Erck R.A., and Erdemir A. Friction of diamond-like carbon films in different atmospheres. Wear 254 (2003) 1070-1075
19. Huang L.-Y., Xu K.-W., Lu J., and Guelorget B. Nano-scratching process and fracture mechanism of amorphous carbon films. Wear 254 (2003) 1032-1036
20. Nakamura I., Sasaki M., Takano I., and Sawada Y. Mechanical properties of carbon-doped TiN films by ion beam irradiation in ethylene gas atmosphere. Surf. Coat. Technol. 196 (2005) 104-107
21. Barshilia H.C., Surya Prakash M., Sridhara Rao D.V., and Rajam K.S. Superhard nanocomposite coating of TiN/a-C prepared by reactive DC magnetron sputtering. Surf. Coat. Technol. 195 (2005) 147-153
22. Mohrbacher H., and Celis J.-P. Friction mechanisms in hydrogenated amorphous carbon coatings. Diamond Relat. Mater. 4 (1995) 1267-1270
23. Wilson S., and Alpas A.T. Tribo-layer formation during sliding wear of TiN coatings. Wear 245 (2000) 223-229