Excimer laser ablation process characteristics for carbon nitride and diamond-like films preparation

Composites Part B: Engineering

Volumn 30, Issue 7, 1999, Pages 691-698

  Aoqui, S ^a   Ebihara, K ^b   Ikegami, T ^b  

^a SOJO UNIVERSITY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COMPOSITE MATERIALS; EXCIMER LASERS; GRAPHITE; HELIUM; HYDROGEN; LASER ABLATION; NITRIDES; NITROGEN; SILICON WAFERS; SINGLE CRYSTALS; THIN FILMS;

CARBON NITRIDE; DIAMOND-LIKE CARBON FILMS;

AMORPHOUS FILMS;

EID: 0033284608     PISSN: 13598368     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-8368(99)00031-1     Document Type: Article

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