Carbon nitride thin films synthesized at high temperature by using RF-plasma PLD

Journal of Crystal Growth

Volumn 198-199, Issue pt 2, 1999, Pages 1028-1031

  Yap, Y K ^a   Mori, Y ^a   Kida, S ^a   Aoyama, T ^a   Sasaki, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CARBON INORGANIC COMPOUNDS; DEPOSITION; ELECTRIC POTENTIAL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE OPERATIONS; NITROGEN; PHASE TRANSITIONS; PLASMAS; PULSED LASER APPLICATIONS; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

BINDING STATES; CARBON MATRIX; CARBON NITRIDE; NEGATIVE BIAS VOLTAGE; TETRAHEDRAL CARBON NITRIDE;

THIN FILMS;

EID: 0033514577     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)01109-9     Document Type: Article

References (11)

1. S. Neuville, A. Matthews, Mater. Res. Bull., September 1997, p. 22.
2. S.R.P. Silva, G.A.J. Amaratunga, J.R. Barnes, Appl. Phys. Lett. 71 (1997) 1477.
3. A. Hoffman, I. Gouzman, R. Brener, Appl. Phys. Lett. 64 (1994) 845.
4. D.G. McCulloch, A.R. Merchant, Thin Solid Films 290/291 (1996) 99.
5. C.W. Ong, X.-A. Zhao, Y.C. Tsang, C.L. Choy, P.W. Chan, Thin Solid Films 280 (1996) 183.
6. Y.K. Yap, M. Inagaki, S. Nakajima, Y. Mori, T. Sasaki, Opt. Lett. 21 (1996) 1384.
7. Y.K. Yap, S. Kida, T. Aoyama, Y. Mori, T. Sasaki, in: S. Fujiwara et al. (Eds.), "Super Carbon", Proc. Symp. I, IUMRS-ICA-97, MYU, Tokyo, 1998, p. 101.
8. M.R. Wixom, J. Am. Ceram. Soc. 73 (1990) 1973.
9. Y. Taki, T. Kitagawa, O. Takai, Thin Solid Films 304 (1997) 183.
10. H. Tsai, D.B. Bogy, J. Vac. Sci. Technol. A 5 (1987) 3287.
11. N.C. Cho, D.K. Veirs, J.W. Ager III, M.D. Rubin, C.B. Hoopper, D.B. Bogy, J. Appl. Phys. 71 (1992) 2243.