SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1269-1272

Argon gas dilution effect on the properties of amorphous carbon nitride thin films

Author keywords

Carbon nitride; Optical properties; Surface wave plasma; XPS

Indexed keywords

AMORPHOUS CARBON; ARGON; CHEMICAL VAPOR DEPOSITION; DILUTION; OPTICAL PROPERTIES; PLASMAS; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS FLOW RATE; PLASMA SOURCE; QUARTZ SUBSTRATES; SURFACE-WAVE PLASMA;

THIN FILMS;

EID: 34047243835 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2006.12.033 Document Type: Article

Times cited : (12)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.