Compositional and thickness distribution of carbon nitride films grown by PLD in the target plane

Thin Solid Films

Volumn 453-454, Issue , 2004, Pages 172-176

  Geretovszky, Zs ^a   Szorenyi T ^a  

^a UNIVERSITY OF SZEGED   (Hungary)

Author keywords

Carbon nitride; Off axis geometry; On axis geometry; Pulsed laser deposition

Indexed keywords

CARBON NITRIDE; EVAPORATION; EXCIMER LASERS; FILM GROWTH; MASKS; MICROSTRUCTURE; NITROGEN; OXYGEN; PULSED LASER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

OFF-AXIS GEOMETRY; ON-AXIS GEOMETRY;

THIN FILMS;

EID: 1542635989     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.097     Document Type: Conference Paper

References (7)

1. Kennedy R.J. Thin Solid Films. 214:1992;223.
2. Holzapfel B., Roas B., Schultz L., Bauer P., Saemann-Ischenko G. Appl. Phys. Lett. 61:1992;3178.
3. Trajanovic Z., Senapati L., Sharma R.P., Venkatesan T. Appl. Phys. Lett. 66:1995;2418.
4. Kinoshita K., Ishibashi H., Kobayashi T. Jap. J. Appl. Phys. 33:1994;L610.
5. Inoue N., Ozaki T., Monnaka T., Kashiwabara S., Fujimoto R. Jap. J. Appl. Phys. 36:1997;704.
6. Agostinelli E., Kaciulis S., Vittori-Antisari M. Appl. Surf. Sci. 156:2000;143.
7. Szörényi T., Tóth A.L., Bertóti I., Antoni F., Fogarassy E. Diamond Relat. Mater. 11:2002;1153.