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Diamond and Related Materials

Volumn 10, Issue 9-10, 2001, Pages 1901-1909

Preparation of nitrogen-rich CNx films with inductively coupled plasma CVD and pulsed laser deposition

(7) Bulir J a Delplancke Ogletree, M P a Lancok J b Jelinek M b Popov, C c Klett, A c Kulisch, W c

a UNIVERSITÉ LIBRE DE BRUXELLES (Belgium)

b INSTITUTE OF PHYSICS (Czech Republic)

c UNIVERSITY OF KASSEL (Germany)

Author keywords

Carbon nitride films; Inductively coupled plasma chemical vapor deposition; Pulsed laser deposition

Indexed keywords

CRYSTALLIZATION; DEPOSITION; FILMS; NITROGEN;

CHEMICAL TRANSPORT REACTIONS;

DIAMONDS;

CARBON NITRIDE;

EID: 0035446909 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00436-8 Document Type: Article

Times cited : (18)

References (43)

1
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, A.L.²

2
- 0000360882
- (1995) Int. J. Mod. Phys. B , vol.9 , pp. 3527
- Marton, D.¹ Boyd, K.J.² Rabelais, J.W.³

3
- 0342945364
- (1995) Phys. Rev. Lett , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.-E.⁴

4
- 0029736292
- (1996) Mater. Chem. Phys , vol.43 , pp. 1
- Sung, C.M.¹ Sung, M.²

5
- 0001363859
- (1997) Mater. Res. Innovation , vol.1 , pp. 161
- De Vries, R.C.¹

6
- 0003671410
- January
- (1998) MRS Bullet , pp. 23
- Teter, D.M.¹

7
- 0003540517
- Deposition of superhard diamond-like materials
- Heidelberg Berlin
- (1999) Springer Tracts on Modern Physics
- Kulisch, W.¹

8
- 0028445814
- (1994) Thin Solid Films , vol.246 , pp. 103
- Sjöström, H.¹ Ivanov, I.² Johansson, A.³

9
- 0030164560
- (1996) Thin Solid Films , vol.279 , pp. 34
- Wan, L.¹ Egerton, R.F.²

10
- 0000826746
- (1996) Appl. Phys. Lett , vol.68 , pp. 2639
- Zhang, Z.J.¹ Fan, S.² Huang, J.³ Lieber, C.A.⁴

11
- 0002685382
- (1997) Appl. Phys. Lett , vol.71 , pp. 324
- Chi, E.J.¹ Shim, J.Y.² Baik, H.K.³ Lee, S.M.⁴

12
- 21844481998
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2914
- Vepřek, S.¹ Weidmann, J.² Glatz, F.³

13
- 0033907943
- (2000) Phys. Stat. Sol , vol.177 , Issue.a , pp. 63
- Kulisch, W.¹

14
- 0000036569
- (1995) Diamond Relat. Mater , vol.4 , pp. 272
- Reinke, S.¹ Kuhr, M.² Kulisch, W.³ Kassing, R.⁴

15
- 0029492322
- (1995) Mater. Res. Soc. Symp. Proc , vol.354 , pp. 93
- Hofsäss, H.¹ Ronning, C.² Griesmeier, U.³ Gross, M.⁴

16
- 51149218763
- (1995) Appl. Phys. Lett , vol.66 , pp. 2652
- Zhao, X.-A.¹ Ong, C.W.² Tsang, Y.C.³ Wong, Y.W.⁴ Chan, P.W.⁵ Choy, C.L.⁶

17
- 0031553490
- (1997) Thin Solid Films , vol.292 , pp. 318
- Bulir, J.¹ Jelinek, M.² Vorlicek, V.³ Zemek, J.⁴ Perina, V.⁵

18
- 0018444910
- (1979) J. Vac. Sci. Technol , vol.16 , pp. 299
- Cuomo, J.J.¹ Leary, P.A.² Yu, D.³ Reuter, W.⁴ Frisch, M.⁵

19
- 33751158752
- (1991) Chem. Mater , vol.6 , pp. 811
- Kouvetakis, J.¹ Bandari, A.² Todd, M.³ Wilkens, B.⁴ Cave, N.⁵

20
- 0001615725
- (1998) Carbon , vol.36 , pp. 765
- Falk, F.¹ Meinschien, J.² Schuster, K.³ Stafast, H.⁴

21
- 0000237461
- (1999) Chem. Vap. Deposition , vol.5 , pp. 265
- Ivanov, B.¹ Zambov, L.² Georgiev, G.³ Popov, C.⁴ Plass, M.F.⁵ Kulisch, W.⁶

22
- 0029493016
- (1995) J. Mater. Res , vol.10 , pp. 3079
- Kreider, K.G.¹ Tarlov, M.J.² Cillen, G.J.³

23
- 0030487320
- (1996) J. Vac. Sci. Technol , vol.14 A , pp. 2696
- Zheng, W.T.¹ Sjöström, H.² Ivanov, I.³

24
- 0032399431
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2941
- Hammer, P.¹ Victoria, N.M.² Alvarez, F.³

25
- 4243732025
- J. Singh, S. Copley, J. Mazumder (Eds.), ASM Int, Materials Park
- (1996) 2nd International Conference on Beam Processing of Advanced Materials , pp. 29
- Hofsäss, H.¹ Ronning, C.²

26
- 0000627016
- (1997) Mat. Res. Soc. Symp. Proc , vol.438 , pp. 575
- Hofsäss, H.¹ Ronning, C.² Feldermann, H.³ Sebastian, M.⁴

27
- 0034516522
- (2000) Thin Solid Films , vol.377-378 , pp. 148
- Kulisch, W.¹ Popov, C.² Zambov, L.³

28
- 0003516693
- in press
- (2001) Appl. Phys. A
- Jelínek, M.¹ Kulisch, W.² Delplancke-Ogletree, M.P.³

29
- 0032593263
- (1999) Appl. Phys. A , vol.69 , pp. 241
- Popov, C.¹ Plass, M.F.² Bergmaier, A.³ Kulisch, W.⁴

30
- 0033358299
- (1999) Thin Solid Films , vol.355-356 , pp. 406
- Popov, C.¹ Plass, M.F.² Kassing, R.³ Kulisch, W.⁴

31
- 0033736515
- (2000) Diamond Relat. Mater , vol.9 , pp. 539
- Popov, C.¹ Plass, M.F.² Zambov, L.³ Kulisch, W.⁴

32
- 0032654602
- (1999) Diamond Relat. Mater , vol.8 , pp. 1039
- Kulisch, W.¹ Delplancke-Ogletree, M.P.² Bulit, J.³ Jelínek, M.⁴ Jurek, K.⁵ Zemek, J.⁶

33
- 0033319698
- (1999) Surf. Coat. Technol , vol.116-119 , pp. 261
- Popov, C.¹ Buliř, J.² Ivanov, B.³ Delplancke-Ogletree, M.P.⁴ Kulisch, W.⁵

34
- 3943055339
- (1992) Plasma Sources Sci. Technol , vol.1 , pp. 109
- Hopwood, J.¹

35
- 0003586634
- (1986) J. Vac. Sci. Technol , vol.4 A , pp. 475
- Mito, H.¹ Sekiguchi, A.²

36
- 0003514630
- PhD thesis, Universite Libre de Bruxelles
- (1998)
- Dehbi, L.¹

37
- 0003668276
- Oktober 12
- (1991) Eur. Semiconductor
- Cooke, M.¹ Chamber, A.²

38
- 0003740740
- Chapman and Hall, London
- (1976) The Identification of Molecular Spectra
- Pearse, R.W.B.¹ Gaydon, A.G.²

39
- 0003593976
- (2000) Thin Solid Films , vol.366 , pp. 89
- Jelínek, M.¹ Zemek, J.² Trchova, M.³

40
- 0028449138
- (2000) Diamond Relat. Mater , vol.3 , pp. 1128
- Jelínek, M.¹ Olsan, V.² Soukop, L.³ Charalabidis, D.⁴ Hontzopoulos, E.⁵ Georgiou, E.⁶

41
- 0034509528
- (2000) Thin Solid Films , vol.377-378 , pp. 156
- Popov, C.¹ Zambov, L.² Plass, M.F.³ Kulisch, W.⁴

42
- 84881192995
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 521
- Chen, M.Y.¹ Li, D.² Lin, X.³

43
- 0028732662
- (1994) Thin Solid Films , vol.253 , pp. 85
- Rossi, F.¹ Andre, B.² van Veen, A.³

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