Energy and particle fluxes in PLD processes

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 419-423

  Lenk, A ^a   Schultrich, B ^a   Witke, T ^a   Weiss H J ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; DEPOSITION; EVAPORATION; IRRADIATION; LASER ABLATION; PARTICLE BEAMS; PLASMA FLOW; PULSED LASER APPLICATIONS;

PULSED LASER DEPOSITION (PLD); THIN FILM DEPOSITION;

THIN FILMS;

EID: 0031078457     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00775-1     Document Type: Article

References (5)

1. A. Lenk, Thesis, TU Dresden (1996).
2. T. Witke, Thesis, TU Dresden (1996).
3. C.R. Phipps, T.P. Turner, R.F. Harrison, G.W. York, W.Z. Osborne, G.K. Anderson, X.F. Corlis, L.C. Haynes, H.S. Steele and K.C. Spicochi, J. Appl. Phys. 64 (1988) 1083.
4. H. Hora, Nonlinear Plasma Dynamics at Laser Irradiation, Vol. 102 of Lecture Notes in Physics (Springer, Berlin, New York, 1979).
5. A. Lenk and T. Witke, Fresenius J. Anal. Chem. 353 (1995) 333.