MEMS thermal imager with optical readout

Sensors and Actuators, A: Physical

Volumn 155, Issue 1, 2009, Pages 47-57

  Jones, C D W ^a   Bolle, C A ^a   Ryf, R ^a   Simon, M E ^a   Pardo, F ^a   Aksyuk, V A ^a   Lai, W Y C ^a   Bower, J E ^a   Miner, J F ^a   Klemens, F P ^a   Cirelli, R A ^a   Sorsch, T W ^a   Ferry, E J ^a   Fetter, L A ^a   Pai, C S ^a   Taylor, J A ^a   Vyas, B ^a   Watson, G P ^a   Stekas, B ^a   Baker, M R ^a   Papazian, A R ^a   Basavanhally, N R ^a   Mansfield, W M ^a   Kornblit, A ^a   Keller, R C ^a   Gates, J V ^a   Ramirez, A P ^a   more..

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Cantilever; IR sensor; MEMS; Optical readout; Uncooled IR detector

Indexed keywords

ARRAY DESIGN; CANTILEVER; FUTURE CHALLENGES; IR IMAGER; IR SENSOR; OPTICAL READOUT; PROCESS DEVELOPMENT; SILICON MEMS; THERMAL IMAGERS; UN-COOLED IR; UNCOOLED IR DETECTORS;

ATOMIC FORCE MICROSCOPY; IMAGE SENSORS; INFRARED DETECTORS; MEMS; NANOCANTILEVERS; OPTICAL SENSORS; PIXELS;

MICROELECTROMECHANICAL DEVICES;

EID: 72049105329     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.08.009     Document Type: Article

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