Design and fabrication of a novel Bimorph microoptomechanical sensor

Journal of Microelectromechanical Systems

Volumn 14, Issue 4, 2005, Pages 683-690

  Lim, Si Hyung ^a   Choi, Jongeun ^a   Horowitz, Roberto ^a   Majumdar, Arunava ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Flip over bimaterial (FOB) beam; Interferometry; Out of plane motion; Quartz substrate; Surface micromachining; Surface stress sensing; Temperature sensing; Thermomechanical sensitivity

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; OPTICAL VARIABLES MEASUREMENT; SENSITIVITY ANALYSIS; THERMODYNAMICS;

FLIP-OVER BIMATERIAL (FOB) BEAM; OUT-OF-PLANE MOTION; QUARTZ SUBSTRATE; SURFACE STRESS SENSING; TEMPERATURE SENSING; THERMOMECHANICAL SENSITIVITY;

MICROSENSORS;

EID: 27144550489     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.845446     Document Type: Article

References (16)

1. Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton, and J. Kitching, "Optomechanical uncooled infrared imaging system: Design, microfabrication and performance," J. Microelectromech. Syst., vol. 11, pp. 136-146, 2002.
2. T. Thundat and A. Majumdar, Microcantilevers for Physical, Chemical, and Biological Sensing: Sensors and Sensing in Biology and Engineering. New York: Springer-Verlag, 2003.
3. T. Thundat, E. Finot, Z. Hu, R. H. Ritchie, G. Wu, and A. Majumdar, "Chemical sensing in Fourier space," Appl. Phys. Lett., vol. 77, no. 24, pp. 4061-4063, 2000.
4. D. R. Baselt, B. Fruhberger, E. Klaassen, S. Cemalovic, C. L. Britton Jr., S. V. Patel, T. E. Mlsna, D. McCorkle, and B. Warmack, "Design and performance of a microcantilever-based hydrogen sensor," Sens. Actuators B, no. 88, pp. 120-131, 2003.
5. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H. J. Guntherodt, C. Gerber, and J. K. Gimzewski, "Translating biomolecular recognition into nanomechanics," Science, vol. 288, pp. 316-318, 2000.
6. G. Wu, R. H. Datar, K. M. Hansen, T. Thundat, R. J. Cote, and A. Majumdar, "Bioassay of prostate-specific antigen (PSA) using microcantilevers," Nature Biotechnol., vol. 19, pp. 856-860, 2001.
7. D. Sarid, Scanning Force Microscopy. Cambridge, U.K.: Oxford Univ. Press, 1994.
8. R. Raiteri, M. Grattarola, H.-J. Butt, and P. Skladal, "Micromechanical cantilever-based biosensors," Sens. Actuators B, vol. 79, pp. 115-126, 2001.
9. H.-F. Ji, K. M. Hansen, Z. Hu, and T. Thundat, "Detection of pH variation using modified microcantilever sensors," Sens. Actuators B, no. 72, pp. 232-238, 2001.
10. G. G. Yaralioglu, A. Atalar, S. R. Manalis, and C. F. Quate, "Analysis and design of an interdigital cantilever as a displacement sensor," J. Appl. Phys., vol. 83, no. 12, pp. 7405-7415, 1998.
11. W. H. Chu, M. Mehregany, and R. L. Mullen, "Analysis of tip deflection and force of a bimetallic cantilever microactuator," J. Micromech. Microeng., vol. 3, pp. 4-7, 1993.
12. V. K. Pamula, A. Jog, and R. B. Fair, "Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams," Model. Simulation Microsyst., pp. 410-413, 2001.
13. T. Miyatani and M. Fujihira, "Calibration of surface stress measurements with atomic force microscopy," J. Appl. Phys., vol. 81, no. 11, pp. 7099-7115, 1997.
14. L. Kiesewetter, J. M. Zhang, D. Houdeau, and A. Steckenborn, "Determination of Young's moduli of micromechanical thin films using the resonance method," Sens. Actuators A, vol. 35, pp. 153-159, 1992.
15. MEMS and Nanotechnology Clearinghouse. [Online]. Available: http://www. memsnet.org
16. V. Ziebart, O. Paul, U. Munch, J. Schwizer, and H. Baltes, "Mechanical properties of thin films from the load deflection of long clamped plates," J. Microelectromech. Syst., vol. 7, pp. 320-328, 1998.