Elimination of stress-induced curvature in microcantilever infrared focal plane arrays

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 331-339

  Huang, Shusen ^a   Li, Biao ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Curvature; Ion beam machining; Microcantilever infrared focal plane arrays; Rapid thermal annealing; Residual stress

Indexed keywords

ARRAYS; CANTILEVER BEAMS; CHEMICAL MODIFICATION; ION BEAMS; MICROELECTROMECHANICAL DEVICES; RAPID THERMAL ANNEALING;

CURVATURE; ION BEAM MACHINING; MICROCANTILEVER INFRARED FOCAL PLANE ARRAYS;

RESIDUAL STRESSES;

EID: 33745821578     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.09.012     Document Type: Article

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