A novel uncooled substrate-free optical-readable infrared detector: Design, fabrication and performance

Measurement Science and Technology

Volumn 17, Issue 7, 2006, Pages 1981-1986

  Li, Chaobo ^a   Jiao, Binbin ^a   Shi, Shali ^a   Chen, Dapeng ^a   Ye, Tianchun ^a   Zhang, Qingchuan ^b   Guo, Zheying ^b   Dong, Fengliang ^b   Miao, Zhengyu ^b  

^a INSTITUTE OF MICROELECTRONICS   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Bi material micro cantilever array; Infrared imaging; Optical readout; Uncooled

Indexed keywords

HEAT LOSSES; INFRARED IMAGING; INFRARED RADIATION; OPTICAL DESIGN; SENSORS; THERMAL EFFECTS;

BI-MATERIAL MICRO-CANTILEVER ARRAY; OPTICAL READOUT; SUBSTRATE-FREE STRUCTURE; UNCOOLED;

RADIATION DETECTORS;

HEAT LOSSES; INFRARED IMAGING; INFRARED RADIATION; OPTICAL DESIGN; RADIATION DETECTORS; SENSORS; THERMAL EFFECTS;

EID: 33745486512     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/7/042     Document Type: Conference Paper

References (11)

1. Tidrow M Z and Dyer W R 2001 Infrared Phys. Technol. 42 333
2. Howard G B 2001 Proc. SPIE 2468 2
3. Shen W and Perera A G 2000 Chin. Phys. Lett. 17 921
4. Rogalski A 2003 Prog. Quantum Electron. 27 59-210
5. Mao M et al 1999 Proc. IEEE MEMS p 100
6. Lai J et al 1997 Sensors Actuators A 58 113
7. Zhao Y et al 2002 J. MEMS 11 136-46
8. Ishizuya T et al 2001 J. Inst. Image Inf. & Telev. Eng. 55 304-9
9. Ishizuya T et al 2002 Proc. IEEE MEMS pp 578-81
10. Zhao Y 2002 Dissertation University of California, Berkeley
11. Moller H J 1993 Semiconductors for Solar Cells (Norwood, MA: Artech House)