Characterization of piston-tip-tilt mirror pixels for scalable SLM arrays

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 21-22

  Pardo, Flavio ^a   Simon, M E ^a   Aksyuk, V A ^a   Ryf, R ^a   Lai, W Y C ^a   Pai, C S ^a   Klemens, F P ^a   Miner, J F ^a   Cirelli, R A ^a   Ferry, E J ^a   Bower, J E ^a   Mansfield, W M ^a   Kornblit, A ^a   Sorsch, T W ^a   Taylor, J A ^a   Baker, M R ^a   Fullowan, R ^a   Dyson, H ^a   Gasparyan, A ^a   Low, Y ^a   Ramsey, D ^a   Arney, S ^a   more..

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PIXELS; POLYSILICON; SCALABILITY;

MICROMIRRORS; MIRROR PIXELS;

ELECTROSTATIC ACTUATORS;

EID: 41549129477     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/omems.2006.1708245     Document Type: Conference Paper

References (2)

1. T. G. Bifano and J. B. Stewart, "High-speed wavefront control using MEMS micromirrors" Proceedings SPIE, 5895 (2005)
2. J. B. Stewart, T. G. Bifano, P. Bierden, S. Corneliss, T. Cook, B. M. Levine, "Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics" presented at Photonics West, San Jose, CA, January, 2006.