High temperature resistant antireflective moth-eye structures for infrared radiation sensors

Microsystem Technologies

Volumn 11, Issue 2-3, 2005, Pages 86-90

  Glaser, T ^a   Ihring, A ^a   Morgenroth, W ^a   Seifert, N ^a   Schroter S ^a   Baier, V ^a  

^a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

Author keywords

Anisotropic etching; Antireflective; Diffractive; Grating; Infrared sensor; Moth eye; Subwavelength

Indexed keywords

ANISOTROPY; DIFFRACTION GRATINGS; ETCHING; HIGH TEMPERATURE EFFECTS; INFRARED DEVICES; INFRARED RADIATION; INTERFACES (MATERIALS); ION BEAMS; LIGHT REFLECTION; LIGHT TRANSMISSION; MULTILAYERS; SILICON WAFERS; THERMOPILES;

ANISOTROPIC ETCHING; ANTIREFLECTIVE STRUCTURE; INFRARED SENSORS; MOTH-EYE STRUCTURE; SUBWAVELENGTH;

SENSORS;

EID: 24044551691     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0412-5     Document Type: Article

References (11)

1. Bernhard CG (1967) Strukturelle und funktionelle Adaption in einem visuellen System. Endeavour 26: 79-84
2. Bischoff J; Hehl K (2003) Optimod GmbH, http://www.unigit.com
3. Glaser T et al (2002) Diffractive optical isolator made of high-efficiency dielectric gratings only. Appl Opt 41(18): 3558-3566
4. GSolver (2003) Gsolver company, http://www.gsolver.com
5. Hübner U et al (2002) Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures. Appl Phys Mater Sci Proc 76(6): 913-917
6. Liguda et al (2001) Polymer photonic crystal slap waveguide. Appl Phys Lett 78(17): 2434-3436
7. Lommel E (ed) (1888) Joseph von Fraunhofer's gesammelte Schriften/im Auftrage der mathematisch-physikalischen Classe der Königlich Bayerischen Akademie der Wissenschaften, Muenchen
8. Magnusson R et al (1998) Guided-mode resonance Brewster filter. Opt Letts 23(7): 612-614
9. Müller J et al (1998) Thermoelectric and Bolometric Infrared Microsensors. In: "Sensors update" (Eds H. Baltes, W. Göpel, I. Hesse) Wiley-VCH Weinheim, vol 3: 3-28
10. Palik ED (ed) (1991) Handbook of Optical Constants of Solids II. Academic Press, New York
11. Southwell WH (1991) Pyramid-array surface-relief structures producing antireflection index matching on optical surfaces. J Opt Soc of Am 8(3): 549-553