Performance of uncooled microcantilever thermal detectors

Review of Scientific Instruments

Volumn 75, Issue 4, 2004, Pages 1134-1148

  Datskos, P G ^a,b   Lavrik, N V ^a   Rajic, S ^a,b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED IMAGING; INFRARED RADIATION; LIGHT ABSORPTION; PHOTONS; SILICON NITRIDE; TEMPERATURE;

BIMATERIAL; INFRARED PHOTONS; MICROCANTILEVER; THERMAL DETECTORS;

INFRARED DETECTORS;

EID: 2042449118     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1667257     Document Type: Article

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