High sensitivity 25μm and 50μm pitch microcantilever IR imaging arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6542, Issue I, 2007, Pages

  Hunter, Scott R ^a   Maurer, Gregory S ^a   Simelgor, Gregory ^a   Radhakrishnan, Shankar ^a   Gray, John ^a  

^a Multispectral Imaging Inc   (United States)

Author keywords

Bimorph; Imager; Infrared; MEMS; Sensor; Surface micromachining; Thermal

Indexed keywords

BIMORPH; MICROCANTILEVER SENSOR; MICROCANTILEVER STRUCTURES;

IMAGE SENSORS; INFRARED RADIATION; MEMS; SURFACE MICROMACHINING;

CANTILEVER BEAMS;

EID: 35648986203     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726316     Document Type: Conference Paper

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