Discrete power spectrum of line width roughness

Journal of Applied Physics

Volumn 106, Issue 7, 2009, Pages

  Hiraiwa, A ^a,b   Nishida, A ^a  

^a SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^b RENESAS TECHNOLOGY CORP   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURACY OF ANALYSIS; ANALYTIC FORMULA; AUTOCORRELATION FUNCTIONS; CORRELATION LENGTHS; DEVICE CHARACTERISTICS; FUNCTIONAL FORMS; IMAGE NOISE; LARGE SCALE INTEGRATION; LINEWIDTH ROUGHNESS; NOISE COMPONENTS; NOISE EFFECTS; NOISE INTENSITIES; SEM; SEM IMAGE; SPECTRAL ANALYSIS; SPECTRAL LINE SHAPE; STANDARD DEVIATION; TWO-COMPONENT;

CORRELATION DETECTORS; PHOTORESISTORS; POWER SPECTRAL DENSITY; POWER SPECTRUM; REGRESSION ANALYSIS; SPECTROSCOPY; SPECTRUM ANALYSIS; SPECTRUM ANALYZERS; SURFACE TREATMENT;

ROUGHNESS MEASUREMENT;

EID: 70350143385     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3226883     Document Type: Article

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