Bias-free measurement of LER/LWR with low damage by CD-SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 II, Issue , 2006, Pages

  Yamaguchi, Atsuko ^a   Steffen, Robert ^b   Kawada, Hiroki ^b   Iizumi, Takashi ^b  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING; MEASUREMENTS; NOISE ABATEMENT; SIGNAL TO NOISE RATIO; SPURIOUS SIGNAL NOISE; SURFACE ROUGHNESS;

BIAS-FREE MEASUREMENT; FRAME INTEGRATION NUMBERS; LWR MEASUREMENT METHOD; RANDOM NOISE CONTRIBUTION;

SCANNING ELECTRON MICROSCOPY;

EID: 33745620711     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655496     Document Type: Conference Paper

References (3)

1. B. D. Bunday, M. Bishop, D. McCormack, J. S. Villarrubia, A. E. Vladar, R. Dixon, T. Vorburger and N. G. Orji, Proc. SPIE, vol. 5375, 515(2004).
2. J. S. Villarrubia and B. D. Bunday, Proc. SPIE, vol. 5752, 480(2005).
3. A. Yamaguchi, K. Ichinose, S. Shimamoto, H. Fukuda, R. Tsuchiya, K. Ohnishi, H. Kawada and T. Iizumi, Proc. SPIE vol. 5375, 468(2004).