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Volumn 41, Issue 8, 2009, Pages 569-581

Development of novel photo-functional materials based on cyclic oligomers

Author keywords

ArF resist; Calixarene; Cyclodextrin; EB resist; Noria; Refractive index

Indexed keywords

ARF RESIST; ARF RESISTS; ARGON FLUORIDE; CALIXARENE; CALIXARENES; CYCLIC OLIGOMERS; EB RESIST; ELECTRON BEAM RESIST; LINE-AND-SPACE PATTERNS; NORIA; REACTIVE GROUP; RESIST MATERIALS;

EID: 70349659976     PISSN: 00323896     EISSN: 13490540     Source Type: Journal    
DOI: 10.1295/polymj.PJ2009086     Document Type: Article
Times cited : (17)

References (78)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.