An anthracene-containing PMMA derivative for photoresist and channel waveguide applications

Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 150-154

  Paul, Stefan ^a   Halle, Olaf ^a   Einsiedel, Heiko ^a   Menges, Bernhard ^a   Müllen, Klaus ^a   Knoll, Wolfgang ^a   Mittler Neher, Silvia ^a  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

Optical properties; Optical spectroscopy; Polymers; Reaction kinetics

Indexed keywords

DERIVATIVES; FILM PREPARATION; LIGHT ABSORPTION; OPTICAL FILMS; PHOTORESISTS; POLYMETHYL METHACRYLATES; REACTION KINETICS; REFRACTIVE INDEX; ULTRAVIOLET RADIATION;

ENDOPEROXIDE FORMATION; PHOTOCROSSLINKING; PHOTOPATTERNING;

OPTICAL MATERIALS;

EID: 0030290605     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08823-2     Document Type: Article

References (21)

1. R. Loucif-Saibi, K. Nakatani, J.A. Delaire, M. Dumont and Z. Sekkat, Chem. Mater., 5 (1993) 229-237.
2. A. Mukherjee, B.J. Eapen and S.K. Baral, Appl. Phys. Lett., 65 (1994) 3179-3181.
3. G. Berkovic, S. Yitzchaik and V. Krongauz, SPIE Proc., 1560 (1991) 238-242.
4. M. Dumont and Z. Sekkat, SPIE Proc., 1774 (1992) 188-199.
5. H. Einsiedel and S. Mittler-Neher, Appl. Opt., in press.
6. Z. Sekkat and M. Dumont, Appl. Phys. B, 54 (1992) 486-489.
7. S. Paul, S. Stein, W. Knoll and K. Müllen, Acta Polym., 45 (1994) 235-243.
8. S. Paul, Ph.D. Thesis, University of Mainz, 1995.
9. D.A. Holden and J.E. Guillet, Macromolecules, 13 (1980) 289-295.
10. J.S. Hargreaves and S.E. Webber, Macromolecules, 17 (1984) 235-240.
11. X. Mai, R.S. Moshrefzahdeh, M.J. Gibson, G.I. Stegeman and C.T. Seaton, Appl. Optics, 24 (1985) 3155-3161.
12. A. Otomo, S. Mittler-Neher, G.I. Stegeman, W.H.G. Horsthuis and G.R. Möhlmann, Electron. Lett., 29 (1993) 129-130.
13. W. Knoll, MRS Bull., 16 (1991) 29-39.
14. M. Dumont, Y. Levy and D. Morichere, in J. Messier, T. Kajzar and P.N. Prasad (eds.), Organic Molecules for Nonlinear Optics and Photonics, NATO ASI Ser., Vol. 194, Kluwer Academic, Dordrecht, 1991.
15. M. Veith, K.G. Müller, S. Mittler-Neher and W. Knoll, Appl. Phys. B, 60 (1995) 1-4.
16. S. Mittler-Neher, D. Neher, G.I. Stegeman, F.W. Embs and G. Wegner, Chem. Phys., 161 (1992) 289-297.
17. S. Mittler-Neher, A. Otomo, G.I. Stegeman, C.Y.-C. Lee, R. Mehta, A.K. Agrawal and S.A. Jenekhe, Appl. Phys. Lett., 62 (1993) 115-117.
18. W.B. Jackson, N. Amer, A.C. Boccara and D. Fournier, Appl. Opt., 20 (1981) 1333-1344.
19. J.C. Murphy and L.C. Aamodt, J. Appl. Phys., 51 (1980) 4580-4588.
20. S. Paul, S. Stein, W. Knoll and K. Müllen, Acta Polym., 47 (1996) 67-73.
21. L. Baraldi and M.T. Gale, in W. Ehrfeld, W. Karthe, G. Wegner, H.-D. Bauer and H.O. Moser (eds.), Integrated Optics and Micro-Optics with Polymers, Teubner Texte zur Physik, 1993.