A new three-component photoresist based on calix[4]resorcinarene derivative, a cross-linker, and a photo-acid generator

Bulletin of the Chemical Society of Japan

Volumn 71, Issue 12, 1998, Pages 2979-2984

  Nakayama, Tomonari ^a  

^a YAMAGATA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIX[4]RESORCINARENE(2,8,14,20 TETRAMETHYLCALIX[4]ARENE 4,6,10,12,16,18,22,24 OCTOL; CALIXARENE; UNCLASSIFIED DRUG;

ARTICLE; CATALYST; CROSS LINKING; DERIVATIZATION; DEVICE; DRUG SYNTHESIS; NONHUMAN; NUCLEAR MAGNETIC RESONANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR;

EID: 0032411376     PISSN: 00092673     EISSN: None     Source Type: Journal    
DOI: 10.1246/bcsj.71.2979     Document Type: Article

References (2)

1. R. D. Allen, K. J. R. Chen, and P. M. Gallgher-Wetmore, Proc. SPIE, 2438, 250 (1995).
2. M. Hanabatake and A. Furuta, Kobunshi Ronbunshu, 46, 15 (1989).