Integrated charge and position sensing for feedback control of electrostatic MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5765, Issue PART 1, 2005, Pages 42-53

  Anderson, Robert C ^a   Kawade, Balasaheb ^b   Ragulan, Kandiah ^b   Maithripala, D H S ^b   Berg, Jordan M ^b   Gale, Richard O ^b   Dayawansa, W P ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Texas Tech University   (United States)

^c TEXAS TECH UNIVERSITY   (United States)

Author keywords

Charge sensor; Electrostatic MEMS; Integrated sensor; Nonlinear control; Position sensor

Indexed keywords

CHARGE SENSOR; ELECTROSTATIC MEMS; INTEGRATED SENSOR; NONLINEAR CONTROL; POSITION SENSOR;

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ELECTRIC FIELDS; FEEDBACK CONTROL; FINITE ELEMENT METHOD; POSITION MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 25144450472     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600634     Document Type: Conference Paper

References (35)

1. G. T. A. Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, New York, 1998.
2. H. C. Nathanson, W. E. Newell, R. A. Wickstrom and J. R. Davis, "The Reonant Gate Transistor," IEEE Trans. on Electron Devices, 14:3, pp. 117-133, 1967.
3. E. K. Chan, and R. W. Dutton, "Electrostatic micromechanical actuator with extended range of travel," J. Microelectromechanical Systems, 9:3, pp. 321-328, 2000.
4. D. Elata, O. Bochobza-Degni and Y. Nemirovsky, "Analytical Approach and Numerical Alpha-Line method for Pull-in Hyper-surface Extraction of Electrostatic Actuators with Multiple Uncoupled Voltage Sources," J. Microelectromechanical Systems. 12:5, pp. 681-691, 2003.
5. Y. Nemirovsky and O. Bochobza-Degni, "A Methodology for the Pull-In Parameters of Electrostatic Actuators," J. Microelectromechanical Systems, 10:4, pp. 601-615, 2001.
6. J. A. Pelesko, "Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties," SIAM J. Appl. Math. 62, pp. 888-908, 2002.
7. J. A. Pelesko and A. A. Triolo, "Nonlocal Problems in MEMS Device Control," J. Enginering Mathematics, 41:4, 345-366, 2001.
8. J. I. Seeger and S. B. Crary, "Stabilization of Electrostatically Actuated Mechanical Devices," Proc. of the Ninth Int. Conf. on Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, June 16-19, pp. 1133-1136, 1997.
9. S. D. Senturia, Microsystem Design, Kluwer Academic Publishers, Norwell, MA, 2001.
10. P. B. Chu and S. J.Pister, "Analysis of Closed-loop Control of Paralle-Plate Electrostatic MicroGrippers," Proc. of IEEE Int. Conf. Robotics and Automation, pp 820-825, 1994.
11. L. J. Hornbeck, "From cathode rays to digital micromirrors: A history of electronic projection display technology," TI Technical Journal, July-September, pp. 7-46, 1998.
12. R. E. Meier, "DMD pixel mechanics simulation." TI Technical Journal. July-September, pp. 64-74, 1998.
13. D. M. Bloom, "The Grating Light Valve: Revolutionizing Display Technology" Projection Displays III Symposium, SPIE Proceedings Volume 3013, February, 1997.
14. B. McCarthy, G. G. Adams, N. E. McGruer and D. Potter, "A Dynamic Model, Including Contact Bounce, of an Electrostatically Actuated Microswitch," J. Microelectromechanical Systems, 11:3, pp. 276-283, 2002.
15. P. B. Chu, S.-S. Lee, and S. Park, "MEMS: The Path to Large Optical Crossconnects," IEEE Communications Magazine, pp. 80-87, 2002.
16. S. Chung, and Y. Kim, "Design and Fabrication of a 10™10 Micro-Spatial Light Modulator Array for Phase and Amplitude Modulation," Sensors and Actuators A. 78, pp. 63-70, 1999.
17. J. Comtois, A. Michalicek, W. Cowan, and J. Butler, "Surface-micromachined Polysilicon MOEMS for Adaptive Optics," Sensors and Actuators A, 78, pp. 54-62, 1999.
18. J. M. Florence and R. O. Gale, "Coherent optical correlator using a deformable mirror device spatial light modulator in the Fourier plane," Applied Optics, 27:11, pp. 2091-2093, 1988.
19. "Analyzing Hazards from a Distance," Sandia Technology, a Quarterly Research and Development Journal 4:3, pp. 11-12, Fall 2002.
20. T. G. Bifano, R. Mali, J. Perreault, K. Dorton, N. Vandelli, M. Horentein, and D. Castanon, "Continuous membrane, surface micromachined silicon deformable mirror," Optical Engineering, 36:5, pp. 1354-1360, 1997
21. R. Nadal-Guardia, A. Dehe, R. Aigner and L. M. Castaner, "Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point," J. Micro electromechanical Systems, 11:3, pp. 255-263, 2002.
22. J. I. Seeger and B. E. Boser, "Dynamics and Control of Parallel-Plate Actuators Beyond the Electrostatic Instability," Proc. of the Tenth Int. Conf. on Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June 7-9, pp. 474-477, 1999.
23. J. I. Seeger and B. E. Boser, "Charge Control of Parallel-Plate, Electrostatic Actuators and the Tip-In Instability," J. Microelectromechanical Systems, 12:5, pp. 656-671, 2003.
24. D. H. S. Maithripala, J. M. Berg and W. P. Dayawansa, "Capacitive Stabilization of an Electrostatic Actuator: An Output Feedback Viewpoint," Proc. of the 2003 American Control Conference, Denver, CO, pp. 4053-4058, 2003.
25. D. H. S. Maithripala, J. M. Berg and W. P. Dayawansa, "An Energy Based Method for Stabilization of an Electrostatic Actuator," Proc. of the 2003 IMECE, Washington, DC, 2003.
26. D. H. S. Maithripala, J. M. Berg and W. P. Dayawansa, "Control of an Electrostatic MEMS Using Static and Dynamic Output Feedback," ASME Journal of Dynamical Systems Measurement and Control, to appear, 2005.
27. M. S.-C. Lu and G. K. Fedder, "Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage," J. Microelectromechanical Systems, 13:5, pp. 759-769, 2004.
28. M. N. Horenstein, J. A. Perreault, T. G. Bifano, "Differential capacitive position sensor for planar MEMS structures with vertical motion," Sensors and Actuators A, 80, pp. 53-61, 2000.
29. J. M. Kyynarainen, A. S. Oja and H. Seppa, "Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor," J. Analog Integrated Circuits and Signal Processing, 29, pp. 61-70, 2001.
30. H. C. Larnaudie, F. Rivoirard and B. Jammes, "Analytical Simulation of a ID Single Crystal Silicon Electrostatic Micromirror," Proc. of the Second Int. Conf. on Modelling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, pp. 628-631, April 1999.
31. H. Toshiyoshi, M. Mita, H. Fujita, "A MEMS Piggyback Actuator for Hard-Disk Drives," J. Microelectromechanical Systems, 11:6, pp. 648-654, 2002.
32. H. S. Sane, N. Yazdi and C. H. Mastrangelo, "Application of Sliding Mode Control to Electrostatically Actuated Two-Axis Gimbaled Micromirrors, " Proc. of the 2003 American Control Conference, pp. 3726-3721, 2003.
33. P. K. C. Wang, "Feedback Control of Vibrations in a Micromachined Cantilever Beam with Electrostatic Actuators," J. Sound and Vibration, 213:3, pp. 537-550, 1998.
34. R. C. Anderson, The Design and Fabrication of a MEMS Micromirror with Integrated Charge Sensors for Feedback Control, Master's thesis, Texas Tech University Department of Mechanical Engineering, 2004.
35. A. J. Peyton and V. Walsh, Analog electronics with Op Amps: a source of practical circuits, Cambridge University Press 1993.