Magnetically actuated, addressable microstructures

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 249-255

  Judy, Jack W ^a,b,c,d,e   Muller, Richard S ^a,c  

^a IEEE   (United States)

^b University of California   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d UNIVERSITY OF MINNESOTA   (United States)

^e Silicon Light Machines Inc   (United States)

Author keywords

Individually addressed micromirrors; Magnetic actuation; Magnetic and electrostatic addressing; Surface micromachining

Indexed keywords

ARRAYS; ELECTRIC COILS; ELECTROSTATICS; EQUIPMENT TESTING; FABRICATION; MAGNETIC FIELDS; MICROMACHINING; MICROSTRUCTURE; MIRRORS; NUMERICAL METHODS;

INDIVIDUALLY ADDRESSED MICROMIRRORS; MAGNETIC ACTUATION; MICROPHOTONIC SYSTEM; OFF CHIP MAGNETIC FIELD; SURFACE MICROMACHINING;

ACTUATORS;

EID: 0031237318     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623114     Document Type: Article

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