A vertically-supported two-axial torsional micromirror

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 41-44

  Lee, Ki Bang ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DRIVING VOLTAGE; MICROMIRRORS; TORSIONAL MIRRORS;

CMOS INTEGRATED CIRCUITS; ELECTRIC POTENTIAL; FREQUENCIES; LASER APPLICATIONS; MICROELECTRONICS; MICROPROCESSOR CHIPS; OPTICAL SYSTEMS; POLYSILICON;

MIRRORS;

EID: 3042819508     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2003.1189682     Document Type: Conference Paper

References (7)

1. Ofir Degani, Eran Socher, Ariel Lipson, Tomer Leitner, Dan J. Setter, Shmuel Kaldor, and Yael Nemirovsky, "A Pull-In Study of an Electrostatic Torsion Microactuator," Journal of Microelectromechanical Systems, Vol. 7, No. 4, pp. 373-379.
2. Meng-Hsiung Kiang, Olav Solgaard, Kam Y. Lau, Richard Muller, "Electrostatic Combdrive-Actuated Micromirrors for Laser-Beam Scanning and Positioning," Journal of Microelectromechanical Systems, Vol.7, No.1, 1998, pp. 27-37.
3. Jin-Ho Lee, Young-Chul Ko, Do-Hyun Kong, Jong-Min Kim, Ki Bang Lee, Duk-Young Jeon, "Design and Fabrication of Scanning Mirror for Laser Display," Sensors and Actuators, A96, 2002, pp. 223-230.
4. Uma Krishnamoorthy, Daesung Lee, and Olav Solgaard, "Self-Aligned Vertical Electrostatic Combdrives for Micromirror Actuation," Journal of Microelectromechanical Systems, Vol. 12, No. 4, 2003, pp.45 8-464.
5. Veljko Milanovic, Matthew Last, and Kristofer S. J. Pister, "Laterally Actuatoed Torsional Micromirrors for Large Static Deflection," IEEE Photonics Technology Letters, Vol. 15, No. 2, 2003, pp. 245-247.
6. Ki Bang Lee, and Liwei Lin, "Vertically Supported Microresonators," 12th International Conference on Solid-State Sensors and Actuators (Transducers '03), June 8-12, 2003, Boston, USA, pp. 847-850.
7. D.A. Koester, R. Mahadevan, B. Hardy, and K.W. Markus, "MUMPs Design Handbook," Revision 6.0, Cronos Integrated Microsystems, A JDS Uniphase Company, 2001.