Flatness-based control of electrostatically actuated MEMS with application to adaptive optics: A simulation study

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1165-1174

  Zhu, Guchuan ^a   Lévine, Jean ^b   Praly, Laurent ^b   Peter, Yves Alain ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b PSL RESEARCH UNIVERSITY   (France)

Author keywords

Adaptive optics (AO); Deformable mirrors (DM); Electrostatic actuator; Flat systems; Microelectromechanical systems (MEMS); Robust nonlinear control; Trajectory planning

Indexed keywords

DEFORMABLE MIRRORS; FLAT SYSTEM; ROBUST NONLINEAR CONTROL; TRAJECTORY PLANNING;

ABERRATIONS; ADAPTIVE OPTICS; CLOSED LOOP CONTROL SYSTEMS; ELECTROSTATIC ACTUATORS; FEEDBACK CONTROL; MICROACTUATORS; ROBUSTNESS (CONTROL SYSTEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 33749989657     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.880198     Document Type: Article

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