Study of an eletrostatically actuated torsional micromirror with compliant planar springs

Microsystem Technologies

Volumn 14, Issue 1, 2008, Pages 7-16

  You, Jianliang ^a   Packirisamy, Muthukumaran ^a   Stiharu, Ion ^a  

^a Dept of Electrical and Computer Engineering   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; SPRINGS (COMPONENTS); TORSIONAL STRESS;

CASTIGLIANO THEORY; ORTHO PLANAR SPRINGS; RELATIVE COMPLIANCY; STATIC TESTING;

MIRRORS;

EID: 34547838689     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0396-z     Document Type: Article

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