Design of electrostatic actuators for MOEMS applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue , 2002, Pages 200-207

  Hah, Dooyoung ^a   Toshiyoshi, Hiroshi ^a   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Eylectrostatic actuator; MOEMS application; Parallel plate type actuator; Pull in analysis; Vertical comb drive actuator

Indexed keywords

CAPACITANCE; ELECTRIC FIELD EFFECTS; ELECTRODES; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; MIRRORS;

VERTICAL COMB-DRIVE ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 6444245011     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.462812     Document Type: Conference Paper

References (6)

1. A MEMS-based projection display
2. Wavelength add-drop switching using tilting micromirrors
3. Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator
4. Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
5. A flat high-frequency scanning micromirror
6. A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers