Application of sliding mode control to electrostatically actuated two-axis gimbaled micromirrors

Proceedings of the American Control Conference

Volumn 5, Issue , 2003, Pages 3726-3731

  Sane, Harshad S ^a   Yazdi, Navid ^a   Mastrangelo, Carlos H ^a  

^a Corning Intellisense Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALGORITHMS; DYNAMICS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NATURAL FREQUENCIES; ROBUSTNESS (CONTROL SYSTEMS); TORQUE MEASUREMENT;

MICROMIRRORS;

SLIDING MODE CONTROL;

EID: 0142200274     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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