Radio-frequency discharges in oxygen: III. Comparison of modelling and experiment

Journal of Physics D: Applied Physics

Volumn 40, Issue 21, 2007, Pages 6601-6607

  Matyash, K ^a   Schneider, R ^a   Dittmann, K ^b   Meichsner, J ^b   Bronold, F X ^b   Tskhakaya, D ^c  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITY OF GREIFSWALD   (Germany)

^c UNIVERSITY OF INNSBRUCK   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRIC EXCITATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; NATURAL FREQUENCIES;

EXCITATION COLLISIONS; MONTE CARLO COLLISIONS SIMULATIONS; POWERED ELECTRODES; RADIO FREQUENCY DISCHARGES;

OXYGEN;

EID: 35549005490     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/21/020     Document Type: Article

References (14)

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