PIC-MCC modeling of a capacitive RF discharge

Contributions to Plasma Physics

Volumn 44, Issue 7-8, 2004, Pages 589-593

  Matyash, K ^a   Schneider, R ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

Particle in Cell method; Plasma heating by radio frequency fields

Indexed keywords

PARTICLE IN CELL METHOD; PLASMA HEATING BY RADIO-FREQUENCY FIELD; RADIO FREQUENCY FIELDS; RF DISCHARGE;

ELECTRIC DISCHARGES;

EID: 10844282960     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410086     Document Type: Article

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