Kinetics and mechanisms of TiN oxidation beneath Pt thin films

Journal of Applied Physics

Volumn 82, Issue 9, 1997, Pages 4577-4585

  McIntyre, Paul C ^a,b   Summerfelt, Scott R ^a  

^a TEXAS INSTRUMENTS   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001340529     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366194     Document Type: Article

References (28)

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22. Identical results are obtained because the perimeter-to-area ratio is exactly 2/d for any regular polygon, where d is the diameter of the inscribed circle.
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